Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09796483
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Filing Dt:
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03/02/2001
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Publication #:
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Pub Dt:
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11/01/2001
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Inventors:
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Satohiro Okayama, Kazunori Suzuki, Satoru Ichimura, Teruo Yoshino, Tokunobu Akao et al
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Title:
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Substrate processing apparatus and semiconductor manufacturing method
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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14-20, 3-CHOME, HIGASHI-NAKANO |
NAKANO-KU, TOKYO 164-8511, JAPAN |
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OLIFF & BERRIDGE, PLC |
JAMES A. OLIFF |
P.O. BOX 19928 |
ALEXANDRIA, VA 22320 |
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