Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/15/2003
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Application #:
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09814049
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Filing Dt:
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03/22/2001
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Publication #:
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Pub Dt:
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11/01/2001
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Inventors:
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Takanobu Takeda, Jun Watanabe, Katsuya Takemura, Kenji Koizumi
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Title:
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CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION AND PATTERNING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| CHIYODA-KU |
| 6-1, OTEMACHI, 2-CHOME |
| TOKYO, JAPAN |
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| MILLEN, WHITE, ZELANO ET AL |
| TRACY A. LUKE |
| ARLINGTON COURT PLAZA I |
| 2200 CLARENDON BLVD., SUITE 1400 |
| ARLINGTON, VA 22201 |
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