Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/21/2003
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Application #:
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09843592
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Filing Dt:
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04/26/2001
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Publication #:
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Pub Dt:
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11/08/2001
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Inventors:
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Atsushi Yamada, Hiroyasu Simizu, Koichi Kamijo
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Title:
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CHARGED-PARTICLE-BEAM PROJECTION-LENS SYSTEM EXHIBITING REDUCED BLUR AND GEOMETRIC DISTORTION, AND MICROLITHOGRAPHY APPARATUS INCLUDING SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| MARUNOUCHI 3-CHOME |
| FUJI BUILDING, 2-3 |
| CHIYODA-KU, TOKYO 100, JAPAN |
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| KLARQUIST SPARKMAN CAMPBELL, ET AL. |
| DONALD L. STEPHENS, JR. |
| ONE WORLD TRADE CENTER, SUITE 1600 |
| 121 S.W. SALMON STREET |
| PORTLAND, OR 97204-2988 |
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