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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
03/15/2005
Application #:
09817018
Filing Dt:
03/27/2001
Publication #:
Pub Dt:
11/08/2001
Inventors:
Ryuichi Ebinuma, Yuji Sudo
Title:
SUPPORTING STRUCTURE OF OPTICAL ELEMENT, EXPOSURE APPARATUS HAVING THE SAME, AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
Assignment: 1
Reel/Frame:
011921/0256Recorded: 06/21/2001Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
05/15/2001
Exec Dt:
05/16/2001
Assignee:
3-30-2, SHIMOMARUKO, OHTA-KU
TOKYO, JAPAN
Correspondent:
FITZPATRICK, CELLA, HARPER & SCINTO
STEVEN E. WARNER
30 ROCKEFELLER PLAZA
NEW YORK, NEW YORK 10112-3801

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