Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09219453
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Filing Dt:
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12/23/1998
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Publication #:
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Pub Dt:
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12/20/2001
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Inventors:
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MASAHIKO NAKAMURA, YUKIHITO TASHIRO, MASAHITO ISHIHARA, NOBUYUKI TAKAHASHI
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Title:
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MULTICHAMBER SUBSTRATE PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 8-1 YOTSUYA 5-CHOME, FUCHU-SHI |
| TOKYO 183,8508, JAPAN |
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| BURNS, DOANE ET AL |
| PLATON N. MANDROS |
| P.O. BOX 1404 |
| ALEXANDRIA, VIRGINIA 22313-1404 |
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