Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/02/2002
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Application #:
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09350234
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Filing Dt:
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07/09/1999
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Publication #:
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Pub Dt:
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12/27/2001
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Inventors:
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KENNETH S. COLLINS, MICHAEL RICE, FARAHMAND E. ASKARINAM, DOUGLAS A. BUCHBERGER JR. et al
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Title:
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THERMAL CONTROL APPARATUS FOR INDUCTIVELY COUPLED RF PLASMA REACTOR HAVING AN OVERHEAD SOLENOIDAL ANTENNA
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| P.O. BOX 450-A |
| SANTA CLARA, CALIFORNIA 95052 |
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| APLLIED MATERIALS, INC. |
| PETER J. SGARBOSSA |
| P.O. BOX 450-A |
| SANTA CLARA, CA 95052 |
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