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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
03/19/2002
Application #:
09248982
Filing Dt:
02/12/1999
Publication #:
Pub Dt:
01/03/2002
Inventors:
SATOSHI AKIMOTO, SHIGEYUKI UZAWA, SHINJI WAKUI
Title:
PROJECTION EXPOSURE APPARATUS AND METHOD OF CONTROLLING SAME
Assignment: 1
Reel/Frame:
009900/0332Recorded: 04/21/1999Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
03/19/1999
Exec Dt:
03/19/1999
Exec Dt:
03/19/1999
Assignee:
30-2, SHIMOMARUKO 3-CHOME
OHTA-KU, TOKYO, JAPAN
Correspondent:
FITZPATRICK, CELLA, HARPER & SCINTO
STEVEN E. WARNER
30 ROCKEFELLER PLAZA
NEW YORK, NEW YORK 10112-3801

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