Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/21/2002
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Application #:
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09015582
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Filing Dt:
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01/29/1998
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Publication #:
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Pub Dt:
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01/10/2002
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Inventors:
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KAZUTAKA YANAGITA, KIYOFUMI SAKAGUCHI
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Title:
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WAFER PROCESSING APPARATUS AND METHOD, WAFER CONVEY ROBOT, SEMICONDUCTOR SUBSTRATE FABRICATION METHOD, AND SEMICONDUCTOR FABRICATION APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 30-2, SHIMOMARUKO 3-CHOME |
| OHTA-TU, TOKYO, JAPAN |
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| MORGAN & FINNEGAN, L.L.P. |
| MICHAEL M. MURRAY |
| 345 PARK AVENUE |
| NEW YORK, NY 10154 |
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