Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/02/2004
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Application #:
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09861698
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Filing Dt:
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05/22/2001
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Publication #:
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Pub Dt:
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01/17/2002
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Inventors:
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Hitoshi Hatada, Masaki Kato, Motoo Koyama, Masahiro Iguchi, Hiroshi Shirasu
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Title:
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EXPOSURE APPARATUS, METHOD FOR MANUFACTURING THEREOF, METHOD FOR EXPOSING AND METHOD FOR MANUFACTURING MICRODEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU |
| TOKYO 100-8331, JAPAN |
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| OBLON SPIVAK MCCLELLAND MAIER & NEUSTADT |
| MARVIN J. SPIVAK |
| FOURTH FLOOR |
| 1755 JEFFERSON DAVIS HIGHWAY |
| ARLINGTON , VA 22202 |
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