Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09818972
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Filing Dt:
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03/27/2001
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Publication #:
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Pub Dt:
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01/17/2002
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Inventors:
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Katsuhisa Yuda, Ge Xu
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Title:
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Method of forming silicon oxide film and forming apparatus thereof
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 7-1 SHIBA 5-CHOME |
| MINATO-KU, TOKYO, JAPAN |
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| 5-8-1, YOTSUYA |
| FUCHU-SHI, TOKYO, JAPAN |
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| HUTCHINS, WHEELER & DITTMAR |
| DONALD W. MUIRHEAD |
| 101 FEDERAL STREET |
| BOSTON, MA 02110 |
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