Patent Assignment Abstract of Title
NOTE:Results display only for issued patents and published applications.
For pending or abandoned applications please consult USPTO staff.
|
Total Assignments:
1
|
|
Patent #:
|
|
Issue Dt:
|
08/27/2002
|
Application #:
|
09903196
|
Filing Dt:
|
07/10/2001
|
|
Publication #:
|
|
Pub Dt:
|
01/17/2002
| | | | |
|
Inventors:
|
Steven E. Gianoulakis, Avijit K. Ray-Chaudhuri
|
|
Title:
|
LOW THERMAL DISTORTION EXTREME-UV LITHOGRAPHY RETICLE
|
|
|
Assignment:
1
|
|
|
|
|
|
|
CHANGE OF NAME (SEE DOCUMENT FOR DETAILS).
|
|
|
|
|
|
|
|
|
| P.O. BOX 5800, MS-0161 |
| LEGAL TECHNOLOGY TRANSFER CENTER |
| ALBUQUERQUE, NEW MEXICO 87185 |
|
|
|
|
| SANDIA NATIONAL LABORATORIES |
| P.O. BOX 5800, MS-0161 |
| ALBUQUERQUE, NM 87185-0161 |
|
|
Search Results as of:
05/21/2024 02:34 PM
If you have any comments or questions concerning the data displayed,
contact
PRD / Assignments at 571-272-3350. v.2.6
Web interface last modified:
August 25, 2017 v.2.6
|
