Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/11/2003
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Application #:
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09851134
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Filing Dt:
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05/09/2001
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Publication #:
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Pub Dt:
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01/17/2002
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Inventors:
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Junichi Kitano, Yuji Matsuyama, Takahiro Kitano, Hidetami Yaegashi
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Title:
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METHOD AND SYSTEM FOR COATING AND DEVELOPING
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| MINATO-KU |
| 3-6, AKASAKA 5-CHOME, |
| TOKYO,, JAPAN |
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| OBLON SPIVAK ET AL |
| C. IRVIN MCCLELLAND |
| FOURTH FLOOR |
| 1755 JEFFERSON DAVIS HIGHWAY |
| ARLINGTON, VA 22202 |
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