Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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12/06/2005
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Application #:
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09908628
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Filing Dt:
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07/18/2001
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Publication #:
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Pub Dt:
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01/31/2002
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Inventors:
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Wakako Suganuma, Sumito Shimizu, Atsushi Yamada, Shohei Suzuki, Hajime Yamamoto
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Title:
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APPARATUS AND METHODS FOR PATTERNING A RETICLE BLANK BY ELECTRON-BEAM INSCRIPTION WITH REDUCED EXPOSURE OF THE RETICLE BLANK BY BACKSCATTERED ELECTRONS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| MARUNOUCHI 3-CHOME |
| FUJI BUILDING, 2-3 |
| CHIYODA-KU, TOKYO 100, JAPAN |
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| KLARQUIST SPARKMAN CAMPBELL LEIGH & |
| WHINSTON, LLP - DONALD L. STEPHENS JR. |
| ONE WORLD TRADE CENTER, SUITE 1600 |
| 121 S.W. SALMON STREET |
| PORTLAND, OREGON 97204-2988 |
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