Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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05/20/2003
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Application #:
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09761637
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Filing Dt:
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01/18/2001
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Publication #:
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Pub Dt:
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02/07/2002
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Inventors:
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Nobuo Tokai, Yuji Maeda, Masayuki Hashimoto
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Title:
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A METHOD AND APPARATUS FOR FORMING A THIN FILM IN A SEMICONDUCTOR DEVICE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| MCDERMOTT, WILL & EMERY |
| STEPHEN A. BECKER |
| 600 13TH STREET, N.W. |
| WASHINGTON, DC 20005 |
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