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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
10/14/2003
Application #:
09811420
Filing Dt:
03/20/2001
Publication #:
Pub Dt:
02/07/2002
Inventors:
Yoshihiro Shiode, Izumi Tsukamoto, Hiroshi Morohoshi, Yoshio Kawanobe
Title:
FOCUS MEASUREMENT IN PROJECTION EXPOSURE APPARATUS
Assignment: 1
Reel/Frame:
012005/0508Recorded: 07/23/2001Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
07/09/2001
Exec Dt:
07/09/2001
Exec Dt:
07/09/2001
Exec Dt:
07/09/2001
Assignee:
3-30-2, SHIMOMARUKO, OHTA-KU
TOKYO, JAPAN
Correspondent:
FITZPATRICK, CELLA, HARPER & SCINTO
STEVEN E. WARNER
30 ROCKEFELLER PLAZA
NEW YORK, NY 10112-3801

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