Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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05/21/2002
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Application #:
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09816356
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Filing Dt:
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03/26/2001
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Publication #:
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Pub Dt:
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02/07/2002
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Inventors:
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Chao-Chueh Wu, Sheng-Fen Chiu, Jesse Chung, Hsiao-Lei Wang
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Title:
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METHOD FOR MAKING DEEP TRENCH CAPACITORS FOR DRAMS WITH REDUCED FACETING AT THE SUBSTRATE EDGE AND PROVIDING A MORE UNIFORM PAD SI3N4 LAYER ACROSS THE SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SCIENCE BASED INDUSTRIAL PARK |
| NO. 19 LI HSIN ROAD |
| HSIN-CHU, TAIWAN |
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| SCIENCE BASED INDUSTRIAL PARK |
| NO. 19 LI HSIN ROAD |
| HSIN-CHU, TAIWAN R.O.C |
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| SCIENCE BASED INDUSTRIAL PARK |
| ST. MARITN-STREET 53 |
| D-81541 MUNICH, GERMANY |
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| GEORGE O. SAILE |
| 20 MCINTOSH DRIVE |
| POUGHKEEPSIE, NY 12603 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| GUSTAV-HEINEMANN-RING 212 |
| MUNICH, GERMANY 22102 |
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| JONATHAN BOCKMAN |
| C/O MORRISON AND FOERSTER LLP |
| 1650 TYSONS BLVD. SUITE 400 |
| MCLEAN, VA 22102 |
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