Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09827307
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Filing Dt:
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04/06/2001
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Publication #:
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Pub Dt:
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02/21/2002
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Inventors:
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Tadahiro Ohmi, Masaki Hirayama, Ryuu Kaihara
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Title:
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Plasma processing apparatus and plasma processing method
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| AOBA-KU, SENDAI-SHI |
| 1-17-301, KOMEGAFUKURO 2-CHOME |
| MIYAGI 980-0813, JAPAN |
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| AOBA-KU, SENDAI-SHI |
| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-8481, JAPAN |
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| PILLSBURY WINTHROP LLP |
| DALE S. LAZAR |
| 1600 TYSON BLVD |
| INTELLECTUAL PROPERTY GROUP |
| MCLEAN, VA 22102 |
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