Patent Assignment Abstract of Title
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Total Assignments:
2
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Patent #:
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Issue Dt:
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10/07/2003
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Application #:
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09745266
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Filing Dt:
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12/20/2000
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Publication #:
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Pub Dt:
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02/21/2002
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Inventors:
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Fan Zhang, Daniel L. Towery, Joseph A. Levert, Shyama P. Mukherjee
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Title:
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COMPOSITION FOR CHEMICAL MECHANICAL PLANARIZATION OF COPPER, TANTALUM AND TANTALUM NITRIDE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 101 COLUMBIA ROAD, PO BOX 2245 |
| MORRISTOWN, NEW JERSEY 07962 |
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| RUTAN & TUCKER, LLP |
| ROBERT D. FISH |
| 611 ANTON BLVD., 14TH FLOOR |
| COSTA MESA, CA 92626 |
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Assignment:
2
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 101 COLUMBIA ROAD, PO BOX 2245 |
| MORRISTOWN, NEW JERSEY 07962 |
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| RUTAN & TUCKER, LLP |
| ROBERT D. FISH |
| 611 ANTON BLVD., 14TH FLOOR |
| COSTA MESA, CA 92626 |
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