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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
NONE
Issue Dt:
Application #:
09870881
Filing Dt:
05/30/2001
Publication #:
Pub Dt:
02/21/2002
Inventors:
Douglas C. Watson, Michael Kovalerchik, W. Thomas Novak
Title:
CANTILEVER RETICLE STAGE FOR ELECTRON BEAM PROJECTION LITHOGRAPHY SYSTEM
Assignment: 1
Reel/Frame:
011861/0774Recorded: 05/30/2001Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
05/22/2001
Exec Dt:
05/24/2001
Exec Dt:
05/09/2001
Assignee:
2-3 MARUNOUCHI, 3-CHOME
CHIYODA KU, TOKYO, JAPAN
Correspondent:
BEYER WEAVER & THOMAS, LLP
STEVE D. BEYER
P.O. BOX 778
BERKELEY, CA 94704-0078

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