Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/24/2002
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Application #:
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09808049
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Filing Dt:
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03/15/2001
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Publication #:
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Pub Dt:
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02/21/2002
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Inventors:
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Toru Suzuki, Osamu Wakabayashi
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Title:
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METHOD AND INSTRUMENT FOR MEASURING VACUUM ULTRAVIOLET LIGHT BEAM, METHOD OF PRODUCING DEVICE AND OPTICAL EXPOSURE APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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2-3-6, AKASAKA, MINATO-KU |
TOKYO 107-8414, JAPAN |
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STEVENS, DAVIS, MILLER & MOSHER, LLP |
JAMES E. LEDBETTER |
SUITE 850 |
1615 L STREET, NW |
WASHINGTON, DC 20036 |
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