Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/18/2002
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Application #:
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09906712
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Filing Dt:
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07/18/2001
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Publication #:
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Pub Dt:
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02/21/2002
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Inventors:
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Hiroaki Ashizawa, Akinobu Kakimoto
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Title:
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SINGLE-SUBSTRATE-HEAT-PROCESSING APPARATUS AND METHOD FOR SEMICONDUCTOR PROCESS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6 AKASAKA 5-CHOME, MINATO-KU |
| TOKYO 107-8481, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, MAIER ET AL |
| JOSEPH A. SCAFETTA, JR. |
| 1755 JEFFERSON DAVIS HIGHWAY |
| ATTORNEYS AT LAW, FOURTH FLOOR |
| ARLINGTON, VIRGINIA 22202 |
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