Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/04/2003
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Application #:
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09902645
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Filing Dt:
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07/12/2001
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Publication #:
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Pub Dt:
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02/28/2002
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Inventors:
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Yukio Inazuki, Tamotsu Maruyama, Mikio Kojima, Hideo Kaneko, Masataka Watanabe et al
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Title:
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PHASE SHIFT MASK BLANK, PHASE SHIFT MASK, AND METHODS OF MANUFACTURE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| CHIYODA-KU |
| 6-1, OTEMACHI, 2-CHOME |
| TOKYO, JAPAN |
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| MILLEN, WHITE, ZELANO & BRANIGAN, P.C. |
| JUNE COMER |
| 2200 CLARENDON BOULEVARD |
| SUITE 1400 |
| ARLINGTON, VA 22201 |
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