Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/11/2006
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Application #:
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09798930
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Filing Dt:
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03/06/2001
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Publication #:
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Pub Dt:
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02/28/2002
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Inventors:
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Kiyohiko Toshikawa, Yoshikazu Motoyama, Yousuke Motokawa, Yusuke Yagi, Junichi Miyano et al
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Title:
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METHOD OF MANUFACTURING LOW DIELECTRIC FILM BY A VACUUM ULTRAVIOLET CHEMICAL VAPOR DEPOSITION
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Assignment:
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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7-12, TORANOMON 1-CHOME |
MINATO-KU, TOKYO, JAPAN |
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VENABLE |
MICHAEL A. SARTORI, PH.D |
P.O. BOX 34385 |
WASHINGTON, D.C. 20043-9998 |
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