Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09946395
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Filing Dt:
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09/04/2001
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Publication #:
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Pub Dt:
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03/07/2002
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Inventors:
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Harunobu Muto, Hiroshi Yano
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Title:
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Electron beam exposure apparatus, device for shaping a beam of charged particles and method for manufacturing the device
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 1-32-1, ASAHI-CHO, NERIMA-KU |
| TOKYO, 179-0071, JAPAN |
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| MORRISON & FOERSTER, LLP |
| DAVID L. FEHRMAN |
| 555 WEST FIFTH STREET |
| SUITE 3500 |
| LOS ANGELES, CA 90013-1024 |
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