Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/15/2003
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Application #:
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09409185
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Filing Dt:
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09/30/1999
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Publication #:
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Pub Dt:
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03/07/2002
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Inventors:
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SRINIVASAN SUNDARARAJAN, MAYUR TRIVEDI
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Title:
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LOW LEAKAGE CURRENT SILICON CARBONITRIDE PREPARED USING METHANE, AMMONIA AND SILANE FOR COPPER DIFFUSION BARRIER, ETCHSTOP AND PASSIVATION APPLICATIONS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3970 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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| SKJERVEN, MORRILL, MACPHERSON, ET AL. |
| TOM CHEN |
| 25 METRO DRIVE, SUITE 700 |
| SAN JOSE, CA 95110 |
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