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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
7241993
Issue Dt:
07/10/2007
Application #:
09891511
Filing Dt:
06/27/2001
Publication #:
20020028399
Pub Dt:
03/07/2002
Inventors:
Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba et al
Title:
INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTURING DEVICES USING THE SYSTEM
Assignment: 1
Reel/Frame:
012272/0007Recorded: 10/22/2001Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
NAKASUJI, MAMORU
Exec Dt:
08/20/2001
NOJI, NOBUHARU
Exec Dt:
08/20/2001
SATAKE, TOHRU
Exec Dt:
08/20/2001
HATAKEYAMA, MASAHIRO
Exec Dt:
08/20/2001
KIMBA, TOSHIFUMI
Exec Dt:
08/20/2001
SOBUKAWA, HIROSI
Exec Dt:
08/20/2001
YOSHIKAWA, SHOJI
Exec Dt:
08/20/2001
MURAKAMI, TAKESHI
Exec Dt:
08/20/2001
WATANABE, KENJI
Exec Dt:
08/20/2001
KARIMATA, TSUTOMU
Exec Dt:
08/20/2001
OOWADA, SHIN
Exec Dt:
08/20/2001
SAITO, MUTSUMI
Exec Dt:
08/20/2001
YAMAZAKI, YUICHIRO
Exec Dt:
08/20/2001
NAGAI, TAKAMITSU
Exec Dt:
08/20/2001
NAGAHAMA, ICHIROTA
Exec Dt:
08/20/2001
Assignees:
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU
TOKYO, JAPAN
KABUSHIKI KAISHA TOSHIBA
72 HORIKAWA-CHO, SAIWAI-KU
KAWASAKI-SHI, KANAGAWA-KEN, JAPAN
Correspondent:
ARMSTRONG, WESTERMAN, HATTORI, ET AL
WILLIAM G. KRATZ, JR.
1725 K STREET, N.W., SUITE 1000
WASHINGTON, D.C. 20006

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