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Patent Assignment Abstract of Title
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Total Assignments: 3
Patent #:
7135676
Issue Dt:
11/14/2006
Application #:
09891611
Filing Dt:
06/27/2001
Publication #:
20020033449
Pub Dt:
03/21/2002
Inventors:
Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Toshifumi Kimba, Hirosi Sobukawa et al
Title:
INSPECTION SYSTEM BY CHARGED PARTICLE BEAM AND METHOD OF MANUFACTURING DEVICES USING THE SYSTEM
Assignment: 1
Reel/Frame:
012272/0431Recorded: 10/22/2001Pages: 5
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
NAKASUJI, MAMORU
Exec Dt:
08/20/2001
NOJI, NOBUHARU
Exec Dt:
08/20/2001
SATAKE, TOHRU
Exec Dt:
08/20/2001
KIMBA, TOSHIFUMI
Exec Dt:
08/20/2001
SOBUKAWA, HIROSI
Exec Dt:
08/20/2001
YOSHIKAWA, SHOJI
Exec Dt:
08/20/2001
KARIMARA, TSUTOMU
Exec Dt:
08/20/2001
OOWADA, SHIN
Exec Dt:
08/20/2001
SAITO, MATSUMI
Exec Dt:
08/20/2001
HAMASHIMA, MUNEKI
Exec Dt:
08/20/2001
TAKAGI, TORU
Exec Dt:
08/20/2001
Assignees:
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU
TOKYO, JAPAN
NIKON CORPORATION
2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU
TOKYO, JAPAN
Correspondent:
ARMSTRONG, WESTERMAN, HATTORI, ET AL
WILLIAM G. KRATZ, JR.
1725 K STREET, N.W., SUITE 1000
WASHINGTON, D.C. 20006
Assignment: 2
Reel/Frame:
012786/0722Recorded: 04/12/2002Pages: 8
Conveyance:
CORRECTIVE RECORDING TO CORRECT THE 7TH AND 9TH ASSIGNORS NAMES, FILED ON 10-22-2001 RECORDED ON REEL 012272 FRAME 0431.
Assignors:
NAKASUJI, MAMORU
Exec Dt:
08/20/2001
NOJI, NOBUHARU
Exec Dt:
08/20/2001
SATAKE, TOHRU
Exec Dt:
08/20/2001
KIMBA, TOSHIFUMI
Exec Dt:
08/20/2001
SOBUKAWA, HIROSI
Exec Dt:
08/20/2001
YOSHIKAWA, SHOJI
Exec Dt:
08/20/2001
KARIMATA, TSUTOMU
Exec Dt:
08/20/2001
OOWADA, SHIN
Exec Dt:
08/20/2001
SAITO, MUTSUMI
Exec Dt:
08/20/2001
HAMASHIMA, MUNEKI
Exec Dt:
08/20/2001
TAKAGI, TORU
Exec Dt:
08/20/2001
Assignees:
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU
TOKYO, JAPAN
NIKON CORPORATION
2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU
TOKYO, JAPAN
Correspondent:
ARMSTRONG, WESTERMAN & HATTORI, LLP
WILLIAM L. BROOKS
1725 K STREET, N.W. SUITE 1000
WASHINGTON, DC 20006
Assignment: 3
Reel/Frame:
014954/0092Recorded: 01/27/2004Pages: 4
Conveyance:
CHANGE OF ASSIGNEE
Assignors:
NIKON CORPORATION
Exec Dt:
12/24/2003
EBARA CORPORATION
Exec Dt:
12/24/2003
Assignee:
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU
TOKYO, JAPAN
Correspondent:
WESTERMAN HATTORI DANIELS & ADRIAN, LLP
1250 CONNECTICUT AVE., NW
SUITE 700
WASHINGTON, DC 20036
Domestic rep:

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