Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/13/2004
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Application #:
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09948796
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Filing Dt:
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09/10/2001
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Publication #:
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Pub Dt:
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03/28/2002
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Inventors:
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Kenji Udagawa, Tomoyuki Yoshida, Michinori Hashimoto, Fumio Karibe
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Title:
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EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU |
| TOKYO 100-8331, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND ET. |
| MARVIN J. SPIVAK |
| 1755 JEFFERSON DAVIS HIGHWAY, 4TH FL |
| ARLINGTON, VA |
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