Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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09/16/2003
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Application #:
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09858107
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Filing Dt:
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05/15/2001
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Publication #:
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Pub Dt:
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03/28/2002
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Inventors:
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Yoshio Kumagai, Takayuki Toshima
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Title:
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SUBSTRATE RINSING AND DRYING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME |
| MINATO-KU, TOKYO-TO, JAPAN |
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| MORRISON & FOERSTER LLP |
| DAVID L. FEHRMAN |
| 555 WEST FIFTH STREET |
| SUITE 3500 |
| LOS ANGELES, CA 90013-1024 |
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