Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09841044
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Filing Dt:
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04/25/2001
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Publication #:
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Pub Dt:
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04/11/2002
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Inventors:
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Tsuneyuki Hagiwara, Naoto Kondo, Kousuke Suzuki, Eiji Takane, Hiromi Kuwata
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Title:
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Aerial image measurement method and unit, optical properties measurement method and unit, adjustment method of projection optical system, exposure method and apparatus, making method of exposure apparatus, and device manufacturing method
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU |
| TOKYO 100-8331, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND ET AL |
| JOSEPH A. SCAFETTA, JR. |
| 1755 JEFFERSON DAVIS HIGHWAY, 4TH FLOOR |
| ARLINGTON, VA 22202 |
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