Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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03/18/2003
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Application #:
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09815208
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Filing Dt:
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03/22/2001
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Publication #:
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Pub Dt:
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04/18/2002
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Inventors:
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Takeshi Hasegawa, Terumi Ito, Hiroyuki Shiraki
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Title:
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METHOD AND APPARATUS FOR EVALUATING THE QUALITY OF A SEMICONDUCTOR SUBSTRATE
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| CHIYODA-KU |
| 5-1 OHTEMACHI 1-CHOME |
| TOKYO, JAPAN 100-0 |
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| REED SMITH LLP |
| JULES E. GOLDBERG, ESQ |
| 375 PARK AVENUE |
| NEW YORK, NEW YORK 10152 |
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