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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
06/04/2002
Application #:
09490741
Filing Dt:
01/25/2000
Publication #:
Pub Dt:
04/25/2002
Inventors:
Kristian E. Johnsgard, Brad S. Mattson, James McDiarmid, Vladimir J. Zeitlin
Title:
SYSTEM AND METHOD FOR THERMAL PROCESSING OF A SEMICONDUCTOR SUBSTRATE
Assignment: 1
Reel/Frame:
010868/0607Recorded: 06/11/2000Pages: 6
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
05/18/2000
Exec Dt:
05/18/2000
Exec Dt:
06/01/2000
Exec Dt:
05/21/2000
Assignee:
3550 WEST WARREN AVENUE
FREMONT, CALIFORNIA 94538
Correspondent:
WILSON SONSINI GOODRICH & ROSATI
MICHAEL J. MURPHY
650 PAGE MILL ROAD, SR 1-2
PALO ALTO, CA 94304-1050

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