Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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08/31/2004
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Application #:
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09994053
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Filing Dt:
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11/27/2001
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Publication #:
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Pub Dt:
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05/02/2002
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Inventors:
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Yoshitomo Nagahashi, Saburo Kamiya, Koichi Katsura
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Title:
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EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD AND ENVIRONMENTAL CONTROL METHOD OF EXPOSURE APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 3-CHOME, CHIYODA-KU |
| TOKYO 100-8331, JAPAN |
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| OBLONS, SPIVAK, MCCLELLAND, MAIER ET AL |
| GREGORY J. MAIER |
| 1755 JEFFERSON DAVIS HWY, FOURTH FLOOR |
| ARLINGTON, VIRGINIA 22202 |
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