Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/01/2002
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Application #:
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09941766
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Filing Dt:
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08/30/2001
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Publication #:
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Pub Dt:
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05/09/2002
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Inventors:
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Sei Tsunoda, Hideharu Nobutoki, Noboru Mikami
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Title:
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LOW DIELECTRIC CONSTANT FILM COMPOSED OF BORON,NITROGEN, AND HYDROGEN HAVING THERMAL RESISTANCE, PROCESS FOR FORMING THE FILM, USE OF THE FILM BETWEEN SEMICONDUCTOR DEVICE LAYERS, AND THE DEVICE FORMED FROM THE FILM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 2-3, MARUNOUCHI 2-CHOME, CHIYODA-KU |
| TOKYO 100-8310, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, ET AL. |
| NORMAN F. OBLON |
| 1755 JEFFERSON DAVIS HWY. |
| FOURTH FLOOR |
| ARLINGTON, VA 22202 |
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