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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
09/07/2004
Application #:
09985240
Filing Dt:
11/02/2001
Publication #:
Pub Dt:
05/16/2002
Inventor:
Hitoshi Nakano
Title:
EXPOSURE APPARATUS, DEVICE MANUFACTURING METHOD, GAS SUBSTITUTING APPARATUS, AND GAS SUBSTITUTING METHOD
Assignment: 1
Reel/Frame:
012297/0184Recorded: 11/02/2001Pages: 2
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignor:
Exec Dt:
10/29/2001
Assignee:
3-30-2, SHIMOMARUKO, OHTA-KU
TOKYO, JAPAN
Correspondent:
FITZPATRICK, CELLA, HARPER & SCINTO
STEVEN E. WARNER
30 ROCKEFELLER PLAZA
NEW YORK, NY 10112-3801

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