Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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02/11/2003
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Application #:
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09951506
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Filing Dt:
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09/14/2001
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Publication #:
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Pub Dt:
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05/16/2002
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Inventors:
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Jae-dong Lee, Bo-Un Yoon, Kyoung-Mo Yang, Sang-Rok Hah
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Title:
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METHOD OF CONTROLLING WAFER POLISHING TIME USING SAMPLE-SKIP ALGORITHM AND WAFER POLISHING USING THE SAME
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| SUWON-CITY |
| 416, MAETAN-DONG, PALDAL-GU |
| KYUNGKI-DO, KOREA, REPUBLIC OF |
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| JONES VOLETINE, PLLC |
| SUSAN S. MORSE |
| 1220 SUNRISE VALLEY DRIVE, SUITE 150 |
| RESTON, VA 20191 |
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