Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10045746
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Filing Dt:
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10/26/2001
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Publication #:
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Pub Dt:
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05/30/2002
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Inventors:
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Mamiko Miyanaga, Yoshikatsu Shirai, Masahiro Morimoto
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Title:
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Cleaning method for vapor phase deposition apparatus, and vapor phase deposition apparatus
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3050 BOWERS AVENUE |
| SANTA CLARA, CALIFORNIA 95054 |
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| MOSER, PATTERSON & SHERIDAN, LLP |
| WILLIAM B. PATTERSON |
| 3040 POST OAK BLVD. |
| SUITE 1500 |
| HOUSTON, TX 77056 |
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