Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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09987599
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Filing Dt:
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11/15/2001
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Publication #:
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Pub Dt:
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05/30/2002
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Inventors:
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Hideaki Kawai, Noboru Tokumasu, Takayoshi Azumi
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Title:
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Semiconductor manufacturing system and method for cleaning the same
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| MITA 3-CHOME, MINATO-KU, |
| TOKYO, JAPAN 108-0 |
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| 13-29, KONAN 2-CHOME, |
| MINATO-KU, TOKYO 108-0075, JAPAN |
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| LORUSSO & LOUD |
| GEORGE A. LOUD, ESQUIRE |
| 3137 MOUNT VERNON AVENUE |
| ALEXANDRIA, VA 22305 |
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