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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
6514352
Issue Dt:
02/04/2003
Application #:
09971578
Filing Dt:
10/09/2001
Publication #:
20020066465
Pub Dt:
06/06/2002
Inventors:
Hideto Gotoh, Takayuki Niuya, Kojiro Abe, Hiroyuki Mori, Hiroshi Matsunaga et al
Title:
CLEANING METHOD USING AN OXIDIZING AGENT, CHELATING AGENT AND FLUORINE COMPOUND
Assignment: 1
Reel/Frame:
012308/0952Recorded: 11/09/2001Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
GOTOH, HIDETO
Exec Dt:
10/26/2001
NIUYA, TAKAYUKI
Exec Dt:
10/26/2001
MORI, HIROYUKI
Exec Dt:
10/26/2001
MATSUNAGA, HIROSHI
Exec Dt:
10/26/2001
ISHIHARA, FUKUSABURO
Exec Dt:
10/26/2001
KIMURA, YOSHIYA
Exec Dt:
10/26/2001
SOTOAKA, RYUJI
Exec Dt:
10/26/2001
GOTO, TAKUYA
Exec Dt:
10/26/2001
AOYAMA, TETSUO
Exec Dt:
10/26/2001
ABE, KOJIRO
Exec Dt:
10/26/2001
Assignees:
TOKYO ELECTRON LIMITED
3-6, AKASAKA 5-CHOME, MINATO-KU
TOKYO, JAPAN
MITSUBISHI GAS CHEMICAL COMPANY, INC.
5-2, MARUNOUCHI, 2-CHOME, CHIYODA-KU
TOKYO, JAPAN
Correspondent:
ANTONELLI, TERRY, STOUT & KRAUS, LLP
ALAN E. SCHIAVELLI
1300 NORTH 17TH STREET
SUITE 1800
ARLINGTON, VA 22209

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