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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
09/03/2002
Application #:
09732931
Filing Dt:
12/11/2000
Publication #:
Pub Dt:
06/13/2002
Inventors:
Nobuo Shimazu, Takao Utsumi
Title:
MANUFACTURING METHOD OF MASK FOR ELECTRON BEAM PROXIMITY EXPOSURE AND MASK
Assignment: 1
Reel/Frame:
011845/0126Recorded: 03/30/2001Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
01/29/2001
Exec Dt:
02/02/2001
Assignee:
1337-13 HON-MACHIDA
MACHIDA-CITY, TOKYO, JAPAN 194-0
Correspondent:
NIXON PEABODY LLP
DAVID S. SAFRAN
8180 GREENSBORO DRIVE
SUITE 800
MCLEAN, VA 22102

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