Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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07/02/2002
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Application #:
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09323010
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Filing Dt:
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06/01/1999
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Publication #:
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Pub Dt:
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06/20/2002
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Inventors:
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MICHAEL S. GORDON, RODNEY A. KENDALL, DAVID J. PINCKNEY
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Title:
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MULTIPLE NUMERICAL APERTURE ELECTRON BEAM PROJECTION LITHOGRAPHY SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| OHI PLANT, 6-3, NISHI-OHI 1-CHOME |
| SHINAGAWA-KU, TOKYO, JAPAN 140-6 |
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| WHITHAM, CURTIS & WHITHAM |
| MARSHALL M. CURTIS |
| RESTON INTERNATIONAL CENTER |
| 11800 SUNRISE VALLEY DRIVE - SUITE 900 |
| RESTON, VIRGINIA 20191 |
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