Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/11/2003
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Application #:
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09971374
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Filing Dt:
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10/04/2001
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Publication #:
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Pub Dt:
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06/20/2002
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Inventors:
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Jian Zhang, Jing Pan
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Title:
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IN-SITU THICKNESS AND REFRACTIVE INDEX MONITORING AND CONTROL SYSTEM FOR THIN FILM DEPOSITION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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