Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/09/2004
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Application #:
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10004892
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Filing Dt:
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12/07/2001
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Publication #:
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Pub Dt:
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06/20/2002
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Inventors:
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Michiaki Matsushita, Masataka Matsunaga, Seiji Kozawa
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Title:
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COATING AND DEVELOPING APPARATUS AND PATTERN FORMING METHOD
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 3-6, AKASAKA 5-CHOME, MINATO-KU |
| TOKYO-TO, JAPAN |
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| OBLON, SPIVAK, MCCLELLAND, ET AL. |
| C. IRVIN MCCLELLAND |
| 1755 JEFF DAVIS HWY., 4TH FLOOR |
| ARLINGTON, VA 22202 |
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