Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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10/29/2002
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Application #:
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09757552
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Filing Dt:
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01/09/2001
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Publication #:
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Pub Dt:
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07/11/2002
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Inventors:
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Jean Qing Lu, Tom Yu, Jeffrey Tobin, Linda Stenzel
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Title:
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APPARATUS AND METHOD FOR IMPROVING FILM UNIFORMITY IN A PHYSICAL VAPOR DEPOSITION SYSTEM
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 4000 NORTH FIRST STREET |
| SAN JOSE, CALIFORNIA 95134 |
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| SQUIRE, SANDERS & DEMPSEY L.L.P. |
| AARON WININGER |
| 600 HANSEN WAY |
| PALO ALTO, CA 94304-1043 |
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