Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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10008689
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Filing Dt:
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11/08/2001
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Publication #:
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Pub Dt:
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07/11/2002
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Inventor:
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Yukiharu Okubo
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Title:
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STAGE DEVICES CONFIGURED FOR USE IN A VACUUM ENVIRONMENT OF A CHARGED-PARTICLE-BEAM MICROLITHOGRAPHY APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| FUJI BUILDING, 2-3 |
| MARUNOUCHI 3-CHOME, CHIYODA-KU |
| TOKYO 100, JAPAN |
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| KLARQUIST SPARKMAN LLP |
| DONALD L. STEPHENS JR. |
| ONE WORLD TRADE CENTER, STE. 1600 |
| 121 SW. SALMON ST. |
| PORTLAND, OR 97204-2988 |
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