Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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11/11/2003
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Application #:
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09809202
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Filing Dt:
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03/16/2001
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Publication #:
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Pub Dt:
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07/18/2002
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Inventors:
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Yoshinori Momonoi, Kenetsu Yokogawa, Masaru Izawa, Shinichi Tachi
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Title:
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APPARATUS FOR CLEANING SEMICONDUCTOR WAFERS IN A VACUUM ENVIRONMENT
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 6, KANDA SURUGADAI 4-CHOME |
| CHIYODA-KU, TOKYO,, JAPAN |
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| MATTINGLY, STANGER & MALUR, P. C. |
| JOHN R. MATTINGLY |
| 1800 DIAGONAL RD., STE. 370 |
| ALEXANDRIA, VA 22314 |
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