Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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06/24/2003
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Application #:
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09767648
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Filing Dt:
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01/22/2001
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Publication #:
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Pub Dt:
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07/25/2002
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Inventors:
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Kadthala R. Narendrnath, Shamouil Shamouilian, Dennis S. Grimard
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Title:
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FABRICATING AN ELECTROSTATIC CHUCK HAVING PLASMA RESISTANT GAS CONDUITS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| LEGAL AFFAIRS DEPARTMENT, MAIL STOP 2061 |
| P.O. BOX 450A |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC. |
| ROBERT W. MULCAHY |
| LEGAL AFFAIRS DEPARTMENT, M/S 2061 |
| P.O. BOX 450A |
| SANTA CLARA, CA 95052 |
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