Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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NONE
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Issue Dt:
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Application #:
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08813200
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Filing Dt:
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03/07/1997
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Publication #:
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Pub Dt:
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08/08/2002
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Inventor:
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MITSUHIRO HIRANO
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Title:
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SUBSTRATE PROCESSING APPARATUS
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| 14-20, 3-CHOME, HIGASHI-NAKANO, NAKANO-KU |
| TOKYO 164, JAPAN |
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| BIRCH, STEWART, KOLASCH & BIRCH, LLP |
| MICHAEL K. MUTTER |
| P.O. BOX 747 |
| FALLS CHURCH, VA 22040-0747 |
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