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Patent Assignment Abstract of Title
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Total Assignments: 1
Patent #:
Issue Dt:
01/18/2005
Application #:
10066627
Filing Dt:
02/06/2002
Publication #:
Pub Dt:
08/08/2002
Inventors:
Hitoshi Kato, Kohei Fukushima, Takeshi Kumagai, Atsushi Endo, Tatsuo Nishita
Title:
A PRECLEANING METHOD OF PRECLEANING A SILICON NITRIDE FILM FORMING SYSTEM
Assignment: 1
Reel/Frame:
012566/0050Recorded: 02/06/2002Pages: 3
Conveyance:
ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
Assignors:
Exec Dt:
02/01/2002
Exec Dt:
02/01/2002
Exec Dt:
02/01/2002
Exec Dt:
02/01/2002
Exec Dt:
02/01/2002
Assignee:
3-6, AKASAKA 5-CHOME, MINATO-KU
TOKYO-TO, JAPAN
Correspondent:
SMITH, GAMBRELL & RUSSELL, LLP
MICHAEL A. MAKUCH
1850 M. STREET NW-SUITE 800
WASHINGTON, DC 20036

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