Patent Assignment Abstract of Title
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Total Assignments:
1
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Patent #:
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Issue Dt:
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04/18/2006
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Application #:
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10028922
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Filing Dt:
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12/19/2001
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Publication #:
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Pub Dt:
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08/15/2002
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Inventors:
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Daniel J. Hoffman, Gerald Zheyao Yin, Yan Ye, Dan Katz, Douglas A. Buchberger JR. et al
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Title:
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PLASMA REACTOR WITH OVERHEAD RF ELECTRODE TUNED TO THE PLASMA WITH ARCING SUPPRESSION
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Assignment:
1
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ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS).
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| PATENT COUNSEL, M/S 2061 |
| P.O. BOX 450-A |
| SANTA CLARA, CALIFORNIA 95052 |
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| APPLIED MATERIALS, INC |
| JOSEPH BACH |
| P.O. BOX 450-A |
| PATENT COUNSEL, M/S 2061 |
| SANTA CLARA, CA 95052 |
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